JPH0286152U - - Google Patents
Info
- Publication number
- JPH0286152U JPH0286152U JP16553788U JP16553788U JPH0286152U JP H0286152 U JPH0286152 U JP H0286152U JP 16553788 U JP16553788 U JP 16553788U JP 16553788 U JP16553788 U JP 16553788U JP H0286152 U JPH0286152 U JP H0286152U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- diaphragm
- semiconductor substrate
- semiconductor
- semiconductor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16553788U JPH073647Y2 (ja) | 1988-12-21 | 1988-12-21 | 半導体圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16553788U JPH073647Y2 (ja) | 1988-12-21 | 1988-12-21 | 半導体圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0286152U true JPH0286152U (en]) | 1990-07-09 |
| JPH073647Y2 JPH073647Y2 (ja) | 1995-01-30 |
Family
ID=31452113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16553788U Expired - Lifetime JPH073647Y2 (ja) | 1988-12-21 | 1988-12-21 | 半導体圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073647Y2 (en]) |
-
1988
- 1988-12-21 JP JP16553788U patent/JPH073647Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH073647Y2 (ja) | 1995-01-30 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |